Dr. Luxherta Buzi Profile

Dr. Luxherta Buzi

at IBM Thomas J Watson Research Ctr

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 25 May 2022 Presentation + Paper

L. Buzi, D. Koty, M. Hopstaken, J. Bruley, L. Gignac, M. Sagianis, D. Farmer, H. Miyazoe, A. Mosden, S. Engelmann, R. Bruce

Proceedings Volume 12056, 1205609 (2022) https://doi.org/10.1117/12.2614303

KEYWORDS: Plasma, Etching, Plasma enhanced chemical vapor deposition, Oxygen, Argon, Refractive index, Hydrogen, FT-IR spectroscopy, Wet etching

Proceedings Article | 1 March 2021 Presentation + Paper

L. Buzi, J. Papalia, H. Miyazoe, H.-Y. Cheng, M. Hopstaken, R. Bruce, S. Engelmann

Proceedings Volume 11615, 116150G (2021) https://doi.org/10.1117/12.2581706

KEYWORDS: Plasma, Etching, Chemistry, Switching, Plasma etching, Halogens, Applied physics, Thin films, Semiconductors, Profiling

Proceedings Article | 23 March 2020 Paper

L. Buzi, J. Papalia, M. Khojasteh, H. Miyazoe, M. Hopstaken, S. Molis, R. Bruce, S. Engelmann

Proceedings Volume 11329, 113290S (2020) https://doi.org/10.1117/12.2552474

KEYWORDS: Etching, Plasmas, Argon, Silicon, Oxygen, Carbon, Reactive ion etching, Halogens, Fluorine, Plasma etching

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