Dr. Lynda K. Rowe
at Carleton Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 13, 2008
Proc. SPIE. 6898, Silicon Photonics III
KEYWORDS: Fabrication, Oxides, Waveguides, Polarization, Interfaces, Silicon, Optical testing, Microelectronics, Silicon photonics, Oxidation

PROCEEDINGS ARTICLE | February 9, 2007
Proc. SPIE. 6477, Silicon Photonics II
KEYWORDS: Oxides, Optical fabrication equipment, Waveguides, Polarization, Birefringence, Silicon, Optical testing, Integrated optics, Reactive ion etching, Oxidation

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