Prof. Lynford L. Goddard
Professor at Univ of Illinois
SPIE Involvement:
Senior status | Author
Publications (18)

PROCEEDINGS ARTICLE | March 13, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Wafer-level optics, Signal to noise ratio, Microscopes, Defect detection, Silicon, Inspection, Scanning electron microscopy, Semiconducting wafers, Near field optics, Defect inspection

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Wafer-level optics, Defect detection, Polarization, Imaging systems, Scattering, Silicon, Inspection, Computer simulations, Bridges, Semiconducting wafers, Signal detection, Electromagnetism, Near field optics, Defect inspection

PROCEEDINGS ARTICLE | March 8, 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Wafer-level optics, Nanostructures, Metrology, Error analysis, Silicon, Optical testing, Scatterometry, Inverse problems, Process control, Scatter measurement, Inverse optics

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Light sources, Defect detection, Imaging systems, Speckle, Particles, Inspection, Interferometry, Laser interferometry, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 11, 2015
Proc. SPIE. 9336, Quantitative Phase Imaging
KEYWORDS: Diffraction, Microscopy, Inspection, Interferometry, Linear filtering, Spatial light modulators, Phase imaging, Spatial coherence, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 11, 2015
Proc. SPIE. 9336, Quantitative Phase Imaging
KEYWORDS: Diffraction, Imaging systems, Etching, Image processing, Microscopy, Silicon, Hydrogen, Scanning electron microscopy, Phase imaging, Palladium

Showing 5 of 18 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top