Dr. Lynne Gignac
at IBM TJ Watson Research Ctr
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Semiconductors, Lithography, Etching, Polymers, Silicon, Manufacturing, Oxygen, Line width roughness, Directed self assembly, Line edge roughness, Plasma

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Metrology, Data modeling, Calibration, Silicon, 3D modeling, Atomic force microscopy, Scanning electron microscopy, 3D metrology, Semiconducting wafers, Nanowires

SPIE Journal Paper | 25 September 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Etching, Optical lithography, Photomasks, Silicon, Carbon, Polymethylmethacrylate, Plasma, Metals, Line edge roughness, Directed self assembly

Proceedings Article | 18 April 2013 Paper
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Oxides, Metrology, Sensors, Silicon, Scanning electron microscopy, Transmission electron microscopy, 3D metrology, Semiconducting wafers, Signal detection, Nanowires

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8685, Advanced Etch Technology for Nanopatterning II
KEYWORDS: Electron beam lithography, Optical lithography, Polymethylmethacrylate, Etching, Annealing, Silicon, Photomasks, Directed self assembly, Line edge roughness

Showing 5 of 7 publications
Conference Committee Involvement (1)
Scanning Microscopies 2015
29 September 2015 | Monterey, California, United States
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top