Dr. M. Dalil Rahman
Senior Staff Scientist at EMD Performance Materials Corp
SPIE Involvement:
Author
Publications (51)

PROCEEDINGS ARTICLE | April 7, 2017
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Oxides, Optical lithography, Contamination, Etching, Metals, Silicon, Reflectivity, Photomasks, System on a chip, Plasma

PROCEEDINGS ARTICLE | March 25, 2016
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Silicon, Resistance, Oxygen, Semiconducting wafers

PROCEEDINGS ARTICLE | March 20, 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Oxides, Etching, Metals, Dielectrics, Silicon, Coating, Resistance, Photomasks, Plasma etching, Semiconducting wafers

PROCEEDINGS ARTICLE | March 27, 2014
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Carbon, Etching, Polymers, Silicon, Coating, Resistance, Photomasks, Plasma etching, Semiconducting wafers, System on a chip

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Oxides, Lithography, Etching, Metals, Silicon, Coating, Photoresist materials, Photomasks, Extreme ultraviolet lithography, Semiconducting wafers

PROCEEDINGS ARTICLE | December 11, 2009
Proc. SPIE. 7520, Lithography Asia 2009
KEYWORDS: Carbon, Lithography, Etching, Image processing, Silicon, Coating, Fourier transforms, Oxygen, Photoresist materials, Photomasks

Showing 5 of 51 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top