Dr. M. Dalil Rahman
Senior Staff Scientist at EMD Electronics
SPIE Involvement:
Author
Publications (51)

Proceedings Article | 7 April 2017 Paper
Proc. SPIE. 10149, Advanced Etch Technology for Nanopatterning VI
KEYWORDS: Oxides, Optical lithography, Contamination, Etching, Metals, Silicon, Reflectivity, Photomasks, System on a chip, Plasma

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9779, Advances in Patterning Materials and Processes XXXIII
KEYWORDS: Silicon, Resistance, Oxygen, Semiconducting wafers

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Oxides, Etching, Metals, Dielectrics, Silicon, Coating, Resistance, Photomasks, Plasma etching, Semiconducting wafers

Proceedings Article | 27 March 2014 Paper
Proc. SPIE. 9051, Advances in Patterning Materials and Processes XXXI
KEYWORDS: Carbon, Etching, Polymers, Silicon, Coating, Resistance, Photomasks, Plasma etching, Semiconducting wafers, System on a chip

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Oxides, Lithography, Etching, Metals, Silicon, Coating, Photoresist materials, Photomasks, Extreme ultraviolet lithography, Semiconducting wafers

Showing 5 of 51 publications
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