Dr. M. Edward Motamedi Profile

Dr. M. Edward Motamedi

Retired at

SPIE Involvement:

Publications (40)

SPIE Journal Paper | March 21, 2014

Special Section Guest Editorial: Emerging MOEMS Technology and Applications

Motamedi, M. Edward , Kubby, Joel , Oden, Patrick , Piyawattanametha, Wibool

JM3 Vol. 13 Issue 01

KEYWORDS: Microopto electromechanical systems, Microelectromechanical systems, Micro optics, Mirrors, Photonics, Technologies and applications, Digital micromirror devices, Microsystems, Actuators

Read Abstract

DOWNLOAD PDF

SPIE Journal Paper | October 1, 2005

Editorial: MOEMS: Design, Technology, and Applications

Motamedi, M. Edward

JM3 Vol. 4 Issue 04

DOWNLOAD PDF

SPIE Press Book | April 21, 2005

MOEMS: Micro-Opto-Electro-Mechanical Systems

SPIE Conference Volume | October 2, 2001

MOEMS and Miniaturized Systems II

SPIE Conference Volume | August 22, 2000

MOEMS and Miniaturized Systems

PROCEEDINGS ARTICLE | August 18, 2000

Micro-optics development in the past decade

Proc. SPIE. 4179, Micromachining Technology for Micro-Optics

KEYWORDS: Fabrication, Diffraction, Transformers, Microlens array, Sensors, Photoresist materials, Micro optics, Microlens, Liquid crystals, Photomasks

Read Abstract

PROCEEDINGS ARTICLE | September 3, 1999

Tunneling tip engine for microsensors applications

Proc. SPIE. 3875, Materials and Device Characterization in Micromachining II

KEYWORDS: Infrared sensors, Sensors, Etching, Electrodes, Indium, Silicon, Photomasks, Microsensors, Semiconducting wafers, Feedback signals

Read Abstract

SPIE Conference Volume | September 2, 1999

Miniaturized Systems with Micro-Optics and MEMS

PROCEEDINGS ARTICLE | September 2, 1998

Characterization of micro-opto-electro-mechanical devices

Proc. SPIE. 3513, Microelectronic Structures and MEMS for Optical Processing IV

KEYWORDS: Microelectromechanical systems, Actuators, Electronics, Silicon, 3D modeling, Finite element methods, Chemical elements, Signal detection, Process modeling, Device simulation

Read Abstract

PROCEEDINGS ARTICLE | September 2, 1998

Optical coupling analysis and vibration characterization for packaging of 2X2 MEMS vertical torsion mirror switches

Proc. SPIE. 3513, Microelectronic Structures and MEMS for Optical Processing IV

KEYWORDS: Microelectromechanical systems, Packaging, Gold, Mirrors, Switches, Fiber optics, Electrodes, Silicon, Fiber couplers, Local area networks

Read Abstract

SPIE Conference Volume | September 2, 1998

Microelectronic Structures and MEMS for Optical Processing IV

PROCEEDINGS ARTICLE | June 22, 1998

Surface micromachined devices for microwave and photonic applications

Proc. SPIE. 3419, Optoelectronic Materials and Devices

KEYWORDS: Microelectromechanical systems, Microopto electromechanical systems, Microwave radiation, Microwave photonics, Photonic microstructures

Read Abstract

PROCEEDINGS ARTICLE | March 15, 1998

Novel highly scalable and very high torque micromotor for MEMS and MOEMS applications using the mechanical rectification of oscillatory motion

Proc. SPIE. 3276, Miniaturized Systems with Micro-Optics and Micromechanics III

KEYWORDS: Microelectromechanical systems, Actuators, Microfluidics, Scanners, Ultrasonics, Microactuators, Optical scanning, Microopto electromechanical systems, Micromachining, Prototyping

Read Abstract

PROCEEDINGS ARTICLE | March 15, 1998

MOEM scan engine for bar code reading and factory automation

Proc. SPIE. 3276, Miniaturized Systems with Micro-Optics and Micromechanics III

KEYWORDS: Actuators, Oxides, Mirrors, Electronics, Etching, Metals, Scanners, Silicon, Optical scanning, Microopto electromechanical systems

Read Abstract

SPIE Conference Volume | March 15, 1998

Miniaturized Systems with Micro-Optics and Micromechanics III

SPIE Conference Volume | September 2, 1997

Microelectronic Structures and MEMS for Optical Processing III

PROCEEDINGS ARTICLE | September 2, 1997

G-performance characterization of surface-micromachined FDDI optical bypass switches

Proc. SPIE. 3226, Microelectronic Structures and MEMS for Optical Processing III

KEYWORDS: Actuators, Switches, Interfaces, Micromirrors, Integrated optics, Local area networks

Read Abstract

SPIE Journal Paper | May 1, 1997

Micro-optic integration with focal plane arrays

Motamedi, M. Edward , Tennant, William , Sankur, Haluk , Melendes, Robert , Gluck, Natalie , Park, Sangtae , Arias, Jose , Bajaj, Jagmohan , Pasko, John , McLevige, William , Zandian, Majid , Hall, Randolph , Steckbauer, Karla , Richardson, Patti

OE Vol. 36 Issue 05

KEYWORDS: Microlens, Photoresist materials, Sensors, Diodes, Microlens array, Micro optics, Diffraction, Thin films, Staring arrays, Quantum efficiency

SPIE Journal Paper | May 1, 1997

Micro-opto-electro-mechanical devices and on-chip optical processing

Motamedi, M. Edward , Wu, Ming , Pister, Kristofer

OE Vol. 36 Issue 05

KEYWORDS: Microlens, Microelectromechanical systems, Mirrors, Optical signal processing, Switches, Digital micromirror devices, Fabry–Perot interferometers, Microlens array, Photoresist materials, Micro optics

SPIE Journal Paper | May 1, 1997

Development of micro-electro-mechanical optical scanner

Motamedi, M. Edward , Park, Sangtae , Wang, A. , Dadkhah, Mahyar , Andrews, Angus , Marcy, Henry , Khoshnevisan, Mohsen , Chiou, Arthur , Huhn, R. , Sell, C. , Smits, Johannes

OE Vol. 36 Issue 05

KEYWORDS: Scanners, Optical scanning, Mirrors, Actuators, Metals, Microelectromechanical systems, Silicon, Microactuators, Composites, Semiconductor lasers

SPIE Journal Paper | May 1, 1997

Guest Editorial: Special Section on Micro-Opto-Electro-Mechanical Systems

Motamedi, M. Edward

OE Vol. 36 Issue 05

DOWNLOAD PDF

SPIE Conference Volume | April 11, 1997

Miniaturized Systems with Micro-Optics and Micromechanics II

PROCEEDINGS ARTICLE | April 11, 1997

Optical transformer and collimator for efficient fiber coupling

Proc. SPIE. 3008, Miniaturized Systems with Micro-Optics and Micromechanics II

KEYWORDS: Diffraction, Optical design, Transformers, Microlens array, Lenses, Photoresist materials, Collimators, Microlens, Photomasks, Semiconducting wafers

Read Abstract

PROCEEDINGS ARTICLE | September 23, 1996

On-chip optical processing

Proc. SPIE. 2881, Microelectronic Structures and MEMS for Optical Processing II

KEYWORDS: Microelectromechanical systems, Diffraction, Mirrors, Fabry–Perot interferometers, Switches, Optical signal processing, Microlens array, Photoresist materials, Microlens, Digital micromirror devices

Read Abstract

SPIE Conference Volume | September 23, 1996

Microelectronic Structures and MEMS for Optical Processing II

PROCEEDINGS ARTICLE | March 8, 1996

FPAs and thin film binary optic microlens integration

Proc. SPIE. 2687, Miniaturized Systems with Micro-Optics and Micromechanics

KEYWORDS: Thin films, Diffraction, Microlens array, Lenses, Sensors, Quantum efficiency, Photoresist materials, Microlens, Diodes, Photomasks

Read Abstract

The relatively large detector size of conventional focal plane arrays often acts as a limiting source of noise currents and requires these devices to run at undesirably low temperatures. To reduce the detector size without reducing the detector's quantum efficiency, we have developed efficient on-focal plane collection optics consisting of arrays of thin film binary optic microlenses on the back surface of hybrid detector array structures. P/n polarity photodiodes of an unusual `planar-mesa' geometry were fabricated in epitaxial HgCdTe deposited by molecular beam epitaxy on the `front' side of a CdZnTe substrate. Diffractive (8 - 16 phase level) Ge microlenses were deposited on 48 micrometers centers in a registered fashion (using an IR mask aligner and appropriate marks on the front surface of the CdZnTe) on the back side of the substrate using a lifting process. The lifting process circumvents some of the process limitations of the more conventional chemical etching method to diffractive microlens processing, allowing them to approach more closely their theoretical efficiency limit of > 95%. Prior to microlens deposition, but after diode fabrication, the test structures were flip- chip bonded or `hybridized' using indium interconnections to metallic strip lines which had been photolithographically deposited on sapphire dice (a process equally compatible with a silicon integrated circuit readout). After hybridization, the CdZnTe was thinned to equal the focal length of the lenses in the CdZnTe material. Optical characterization has demonstrated that the microlenses combined with the detector mesas concentrate light sufficiently to increase the effective collection area. The optical size of the mesa detectors being larger than the theoretical diffraction limit of the microlenses precludes determining whether the lenses themselves produce the theoretical diffraction-limited gain, but they clearly decrease required detector area by at least 3 - 6X. To our knowledge, this is the first successful demonstration of IR detectors and binary optics microlens integration.

SPIE Conference Volume | March 8, 1996

Miniaturized Systems with Micro-Optics and Micromechanics

PROCEEDINGS ARTICLE | March 8, 1996

Fabrication of microlens arrays by reactive ion milling

Proc. SPIE. 2687, Miniaturized Systems with Micro-Optics and Micromechanics

KEYWORDS: Microlens array, Etching, Argon, Ions, Silicon, Zinc, Oxygen, Photoresist materials, Microlens, Infrared materials

Read Abstract

SPIE Conference Volume | September 13, 1995

Microelectronic Structures and Microelectromechanical Devices for Optical Processing and Multimedia Applications

PROCEEDINGS ARTICLE | May 12, 1995

Fabrication of refractive microlens arrays

Proc. SPIE. 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping

KEYWORDS: Microlens array, Silica, Lenses, Etching, Germanium, Silicon, Photoresist materials, Solids, Microlens, Reactive ion etching

Read Abstract

PROCEEDINGS ARTICLE | May 12, 1995

Silicon micromachined piezoelectric ZnO bimorphs as micromirrors for display applications

Proc. SPIE. 2383, Micro-Optics/Micromechanics and Laser Scanning and Shaping

KEYWORDS: Gold, Etching, Electrodes, Composites, Silicon, Capacitance, Micromirrors, Zinc oxide, Chemical elements, Semiconducting wafers

Read Abstract

SPIE Conference Volume | May 12, 1995

Micro-Optics/Micromechanics and Laser Scanning and Shaping

SPIE Journal Paper | November 1, 1994

Miniaturized micro-optical scanners

Motamedi, M. Edward , Andrews, Angus , Gunning, William , Khoshnevisan, Mohsen

OE Vol. 33 Issue 11

KEYWORDS: Microlens array, Microlens, Diffraction, Scanners, Actuators, Beam steering, Telecommunications, Transducers, Laser scanners, Geometrical optics

Read Abstract

SPIE Journal Paper | November 1, 1994

Micro-opto-electro-mechanical systems

Motamedi, M. Edward

OE Vol. 33 Issue 11

KEYWORDS: Microlens, Microelectromechanical systems, Diffraction, Micro optics, Microlens array, Microopto electromechanical systems, Sensors, Actuators, Photoresist materials, Silicon

Read Abstract

PROCEEDINGS ARTICLE | December 28, 1993

Merging micro-optics with micromechanics: micro-opto-electro-mechanical (MOEM) devices

Proc. SPIE. 10271, Diffractive and Miniaturized Optics: A Critical Review

KEYWORDS: Staring arrays, Microelectromechanical systems, Optical design, Beam splitters, Microopto electromechanical systems, Micro optics, Microlens, Infrared radiation, Integrated optics, Integrated circuits

Read Abstract

PROCEEDINGS ARTICLE | December 15, 1993

Micro-optic laser beam scanner

Proc. SPIE. 1992, Miniature and Micro-Optics and Micromechanics

KEYWORDS: Actuators, Diffraction, Beam steering, Microlens array, Scanners, Laser scanners, Micro optics, Microlens, 3D scanning, Geometrical optics

Read Abstract

PROCEEDINGS ARTICLE | January 13, 1993

Optical testing and characterization of mirolens arrays

Proc. SPIE. 1751, Miniature and Micro-Optics: Fabrication and System Applications II

KEYWORDS: Thin films, Diffraction, Point spread functions, Microlens array, Imaging systems, Lenses, Quartz, Optical testing, Microlens, Modulation transfer functions

Read Abstract

PROCEEDINGS ARTICLE | January 13, 1993

Binary optics thin-film microlens array

Proc. SPIE. 1751, Miniature and Micro-Optics: Fabrication and System Applications II

KEYWORDS: Thin films, Lithography, Diffraction, Microlens array, Etching, Image processing, Photoresist materials, Sapphire, Microlens, Photomasks

Read Abstract

PROCEEDINGS ARTICLE | November 1, 1991

High-speed binary optic microlens array in GaAs

Proc. SPIE. 1544, Miniature and Micro-Optics: Fabrication and System Applications

KEYWORDS: Staring arrays, Diffraction, Monochromatic aberrations, Microlens array, Gallium arsenide, Micro optics, Microlens, Photomasks, Reactive ion etching, Semiconducting wafers

Read Abstract

PROCEEDINGS ARTICLE | November 1, 1991

Silicon microlenses for enhanced optical coupling to silicon focal planes

Proc. SPIE. 1544, Miniature and Micro-Optics: Fabrication and System Applications

KEYWORDS: Diffraction, Microlens array, Etching, Silicon, Micro optics, Microlens, Photomasks, Optical alignment, Reactive ion etching, Semiconducting wafers

Read Abstract

Showing 5 of 40 publications

Conference Committee Involvement (21)

SPIE MOEMS-MEMS

1 February 2014 | San Francisco, United States

SPIE MOEMS-MEMS

2 February 2013 | San Francisco, United States

SPIE MOEMS-MEMS

22 January 2011 | San Francisco, United States

SPIE MOEMS-MEMS

23 January 2010 | San Francisco, United States

SPIE MOEMS-MEMS: Micro- and Nanofabrication

24 January 2009 | San Jose, United States

Showing 5 of 21 published special sections

Course Instructor

SC237: MOEMS/MEMS Technology and Applications

This course introduces the exciting fields of Micro-optics and MEMS and reviews the synergistic role these technologies play in the emerging field of Micro-Opto-Electro-Mechanical Systems (MOEMS). This course covers this new manufacturing technology will results in high performance devices that are lighter, easier to produce, more efficient, and less expensive than conventionally produced components.

Expand Description +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years