A novel configuration for the channeled spectroscopic ellipsometer (CSE) is presented. The channeled spectroscopic ellipsometry is a snapshot method for the spectrally-resolved polarization analysis. In this method, multiple-order retarders are utilized to generate a channeled spectrum carrying information about the wavelength-dependent multiple parameters of polarization of light. This method has a feature that it requires no mechanical or active components for polarization-control, such as a rotating compensator and an electro-optic modulator. In spite of these advantages, however, the previously proposed configuration of the CSE has a drawback that it is susceptible to the ray-direction variation introduced by the angular fluctuation of the ellipsometric sample. To overcome this drawback, an alternative configuration for the CSE has been developed. In this configuration, the multiple-order retarders are inserted between a light source and a sample, so that the measured results are not affected by the fluctuations due to the reflection from the sample. A compact sensing head whose size is 160mm(W)×53mm(H)×30mm(D) was realized using the new configuration, and applied for the snapshot measurement of the SiO<sub>2</sub> films deposited on a Si substrate, with the acquisition time of 20 ms. The measured thicknesses of the SiO<sub>2</sub> films are almost agree with the results from the rotating-compensator ellipsometer. The configuration that has the multiple-order retarders in the polarization-generating section can apply to other spectroscopic polarimeters to remove the influence of the ray-direction fluctuations due to the reflection or transmission from the sample.