Minae Yoo
at SK Hynix Inc
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 20, 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Reticles, Lithographic illumination, Image processing, Scanning electron microscopy, Optical proximity correction, Photoresist processing, Semiconducting wafers, Standards development, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 16, 2009
Proc. SPIE. 7274, Optical Microlithography XXII
KEYWORDS: Semiconductors, Lithography, Metrology, Optical lithography, Polarization, Critical dimension metrology, Polarization control, Semiconducting wafers, Resolution enhancement technologies, Fiber optic illuminators

PROCEEDINGS ARTICLE | December 4, 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Lithography, Optical lithography, Diffractive optical elements, Printing, Source mask optimization, SRAF, Photoresist processing, Semiconducting wafers, Resolution enhancement technologies, Fiber optic illuminators

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