Dr. Ming Mao
at imec
SPIE Involvement:
Publications (19)

Proceedings Article | 23 March 2020 Paper
B. Vincent, M. Maslow, J. Bekaert, M. Mao, J. Ervin
Proceedings Volume 11323, 1132326 (2020) https://doi.org/10.1117/12.2551606
KEYWORDS: Critical dimension metrology, 3D modeling, Etching, Lithography, Silicon, Extreme ultraviolet, Semiconducting wafers, Calibration, Cadmium, Optical lithography

SPIE Journal Paper | 10 October 2019
JM3, Vol. 18, Issue 04, 044001, (October 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.4.044001
KEYWORDS: Overlay metrology, Semiconducting wafers, Metals, Etching, Scanners, Optical filters, Extreme ultraviolet lithography, Data modeling, Metrology, Scanning electron microscopy

Proceedings Article | 26 March 2019 Presentation + Paper
Pieter Vanelderen, Victor Blanco, Ming Mao, Yoann Tomczak, David de Roest, Nicola Kissoon, Paulina Rincon Delgadillo, Gijsbert Rispens, Guido Schiffelers, Abhinav Pathak, Frederic Lazzarino, Danilo De Simone, Etienne de Poortere, Moyra Mc Manus, Daniele Piumi, Eric Hendrickx, Geert Vandenberghe
Proceedings Volume 10957, 109570S (2019) https://doi.org/10.1117/12.2515503
KEYWORDS: Etching, Lithography, Extreme ultraviolet lithography, Photoresist materials, Logic, Optical lithography

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10959, 1095905 (2019) https://doi.org/10.1117/12.2516154
KEYWORDS: Overlay metrology, Semiconducting wafers, Metals, Scanners, Etching, Optical filters, Extreme ultraviolet lithography, Extreme ultraviolet, Metrology, Wafer-level optics

Proceedings Article | 17 April 2018 Paper
Sophie Thibaut, Angélique Raley, Frederic Lazarrino, Ming Mao, Danilo De Simone, Daniele Piumi , Kathy Barla, Akiteru Ko, Andrew Metz, Kaushik Kumar, Peter Biolsi
Proceedings Volume 10589, 105890M (2018) https://doi.org/10.1117/12.2300355
KEYWORDS: Etching, Photoresist materials, Chemistry, Carbon, Line edge roughness, Lithography, Line width roughness, Extreme ultraviolet lithography, Scanning electron microscopy, Plasma enhanced chemical vapor deposition

Showing 5 of 19 publications
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