Min-Ho Kim
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 16, 2014
Proc. SPIE. 9235, Photomask Technology 2014
KEYWORDS: Metrology, Logic, Image processing, Image analysis, Printing, Photomasks, Computed tomography, Logic devices, Optical proximity correction, Critical dimension metrology

PROCEEDINGS ARTICLE | October 1, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Wafer-level optics, Metrology, Logic, Cadmium, Inspection, Photomasks, Logic devices, Computer aided design, Critical dimension metrology, Semiconducting wafers

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