Minsuk Kim
at ASML Korea Co Ltd
SPIE Involvement:
Publications (4)

Proceedings Article | 27 April 2023 Presentation + Paper
Proceedings Volume 12496, 124960N (2023) https://doi.org/10.1117/12.2658274
KEYWORDS: Scanners, Overlay metrology, Semiconducting wafers, Lithography, Metrology, Dysprosium, Distributed interactive simulations, Design and modelling, Critical dimension metrology, Yield improvement

Proceedings Article | 27 April 2023 Presentation + Paper
Jungmin Lee, Doogyu Lee, Eunji Lee, Inbeom Yim, Jeongjin Lee, Seung Yoon Lee, Chan Hwang, Marc Noot, Arno van Leest, Simon Mathijssen, Yao Gao, Seung-Bin Yang, Mi-Yeon Baek, Do-Haeng Lee, Han-Gyeol Park, Jong-Hyuk Yim, Thomas Kim, Ho-Hyuk Lee, Kemal Dahha, Stefan Smith-Meerman, Koen van Witteveen, Elliott McNamara, Matthew McLaren
Proceedings Volume 12496, 124960H (2023) https://doi.org/10.1117/12.2658330
KEYWORDS: Semiconducting wafers, Overlay metrology, Metrology, Matrices, Polarization, Wafer testing, Signal processing, Independent component analysis, Education and training, Diffraction

Proceedings Article | 26 May 2022 Presentation + Paper
Proceedings Volume 12053, 1205316 (2022) https://doi.org/10.1117/12.2627719
KEYWORDS: Overlay metrology, Diffraction gratings, Semiconducting wafers, Phase measurement, Phase shifts, Diffraction, Optical testing, Optical metrology, Optical design, Etching

Proceedings Article | 26 May 2022 Presentation + Paper
Moosong Lee, Jinsun Kim, Dohyeon Park, Yeeun Han, Junseong Yoon, Seung Yoon Lee, Chan Hwang, Achim Woessner, Cyrus Tabery, Miao Wang, Antonio Corradi, Young-Hoon Song, Yun-A Sung, Thomas Kim, Aileen Soco, Jason Kim, Chih-Hung Hsieh
Proceedings Volume 12053, 1205315 (2022) https://doi.org/10.1117/12.2626721
KEYWORDS: Overlay metrology, Semiconducting wafers, Defect inspection, Metrology, Inspection, Standards development, Image processing, Electronics, Etching, Electrons

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