Miyeon Han
at SAMSUNG SDI Chemicals & Electronic Materials
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 27, 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Carbon, Antireflective coatings, Optical lithography, Etching, Silicon, Materials processing, Manufacturing, Resistance, Reflectivity, Chemical vapor deposition, Photoresist materials, Atomic layer deposition, Photomasks, Double patterning technology, System integration, Plasma, Bottom antireflective coatings

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