Muhummad Madden
at Nagaoka Univ of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | November 20, 2012
Proc. SPIE. 8563, Optical Metrology and Inspection for Industrial Applications II
KEYWORDS: Diffraction, Mirrors, Spindles, Optical sensors, Phase modulation, Modulation, Interferometers, Motion measurement, Signal detection, Diffraction gratings

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