Myung-Gi Kang
at Hanyang Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Cooling systems, Silicon, Hydrogen, Pellicles, Finite element methods, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Convection, Radiation effects

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