Dr. Madhu Bhaskaran
Research Fellow at RMIT Univ
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 24 December 2011
Proc. SPIE. 8204, Smart Nano-Micro Materials and Devices
KEYWORDS: Gold, Thin films, Electrodes, Polymers, Metals, Silicon, Resistance, Microfabrication, Resistors, Flexible circuits

Proceedings Article | 11 January 2007
Proc. SPIE. 6414, Smart Structures, Devices, and Systems III
KEYWORDS: Thin films, Titanium, Sputter deposition, Metals, Annealing, Nickel, Silicon, Atomic force microscopy, Oxygen, Silicon films

Proceedings Article | 20 December 2006
Proc. SPIE. 6415, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems III
KEYWORDS: Gold, Thin films, Ferroelectric materials, Sputter deposition, Silicon, Surface roughness, Platinum, Atomic force microscopy, Silicon films, Thin film deposition

Proceedings Article | 5 January 2006
Proc. SPIE. 6035, Microelectronics: Design, Technology, and Packaging II
KEYWORDS: Oxides, Sputter deposition, Metals, Error analysis, Nickel, Interfaces, Silicon, Resistance, Aluminum, Resistors

Proceedings Article | 4 January 2006
Proc. SPIE. 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
KEYWORDS: Gold, Thin films, Ferroelectric materials, Titanium, Sputter deposition, Platinum, Scanning electron microscopy, Photomicroscopy, Lead, Perovskite

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