Madhulika S. Korde
at SUNY Polytechnic Institute
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Mueller matrices, Data modeling, Etching, Silicon, Transmission electron microscopy, Scatterometry, Process control, Spectroscopic ellipsometry, Field effect transistors, Critical dimension metrology, Optical materials characterization, Nanowires

Proceedings Article | 6 June 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Oxides, Metrology, Etching, Germanium, Silicon, Scatterometry, Process control, Spectroscopic ellipsometry, Critical dimension metrology, Chemical elements

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