PZT are also well known for their applications in Micro Electrical Mechanical Systems (MEMS). It is necessary to study
the piezoelectric coefficients of the materials accurately in order to design a sensor as an example, which defines their
strain dependent applications. Systematic study of the electro mechanic displacement measurement was conducted and
compared using a white light fiber optic sensor, a heterodyne laser Doppler vibrometer, and a homodyne laser
interferometry setup. Frequency dependent measurement is conducted to evaluate displacement values well below and
near the piezoelectric resonances. UHF-120 ultra-high frequency Vibrometer is used to measure the longitudinal
piezoelectric displacement or x33 and the MTI 2000 FotonicTM Sensor is used to measure the transverse piezoelectric
displacement or x11 over 100Hz to 2MHz. A Multiphysics Finite Element Analysis method, COMSOL, is also adopted
in the study to generate a three dimensional electromechanical coupled model based on experimentally determined
strains x33 and x11 as a function of frequency of the electric field applied. The full family of piezoelectric coefficients of
the poled electronic ceramic PZT, d33, d31, and d15, can be then derived, upon satisfactory simulation of the COMSOL.
This is achieved without the usual need of preparation of piezoelectric resonators of fundamental longitudinal,
transversal, and shear modes respectively.
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