Prof. Magali Brunet
at Ctr. National de la Recherche Scientifique
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 30 December 2008 Paper
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Electronics, Microsystems, Signal processing, Structural health monitoring, Smart structures, Thermoelectric materials, Chemical elements, Aircraft structures, Instrument modeling, Current controlled current source

Proceedings Article | 26 February 2008 Paper
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Copper, Silicon, Resistance, Magnetism, Photoresist materials, Micromachining, Electroplating, Prototyping, Inductance, Chemical mechanical planarization

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Capacitors, Etching, Electrodes, Dielectrics, Ions, Silicon, Resistance, Capacitance, Deep reactive ion etching, Plasma

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