Prof. Magali Brunet
at Ctr. National de la Recherche Scientifique
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 30 December 2008
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Aircraft structures, Thermoelectric materials, Smart structures, Current controlled current source, Microsystems, Signal processing, Electronics, Instrument modeling, Chemical elements, Structural health monitoring

Proceedings Article | 26 February 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Magnetism, Chemical mechanical planarization, Electroplating, Copper, Prototyping, Silicon, Inductance, Resistance, Photoresist materials, Micromachining

Proceedings Article | 23 January 2006
Proc. SPIE. 6109, Micromachining and Microfabrication Process Technology XI
KEYWORDS: Etching, Silicon, Capacitance, Capacitors, Resistance, Deep reactive ion etching, Electrodes, Dielectrics, Plasma, Ions

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