Silicon nanowires (SiNWs) have undergone intensive research for their application in novel integrated systems such as
field effect transistor (FET) biosensors and mass sensing resonators profiting from large surface-to-volume ratios (nano
dimensions). Such devices have been shown to have the potential for outstanding performances in terms of high
sensitivity, selectivity through surface modification and unprecedented structural characteristics. This paper presents the
results of mechanical characterization done for various types of suspended SiNWs arranged in a 3D array. The
characterization has been performed using techniques based on atomic force microscopy (AFM). This investigation is a
necessary prerequisite for the reliable and robust design of any biosensing system. This paper also describes the applied
investigation methodology and reports measurement results aggregated during series of AFM-based tests.
This paper is focused on manufacture technology of molecular self-assembled monolayers (SAM) using
microcontact printing (μCP) techniqe. This technique, due to its low-cost and simplicity, is a very attractive one for
further development of molecular electronics and nanotechnology. The SAM can be produced on gold or silicon oxide
using thiol and silane based chemistry respectively. The μCP techniques allow the imposition of molecular structures
in specific areas. The chemical properties of the fabricated layers depend on the functional groups of tail molecules. Such
structures can be used as chemical receptors or as interface between the substrate and the biosensor receptors .
Architecture of the tail molecule determines the chemical reactivity and hydrophilic or hydrophobic properties. In
addition it modifies the tribological properties  and electrical structure parameters, such as contact potential diference
(CPD) . The height of the SAM structure containing carbon chain is highly dependent on the length and type of
binding molecules to the substrate, which enables application of the μCP SAM structures in height metrology. The
results of these studies will be presented in the work.
Microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) are the promising platforms for
mass change observations. These systems in optimal solutions allow to observe the deposition of single molecules. This
is achieved by the structure miniaturization which entails increase of resolution. In this paper, we present fabrication
process of silicon nitride double-clamped beam structures. Moreover, it is presented the basic description of the beam
mechanics which is based on the Euler-Bernoulli beam theory. Additionally results of the measurements of the fabricated
devices are shown. Thanks to the possibility of recording force curves at nanometer deflections using atomic force
microscopy (AFM) system there is a possibility to determine the properties of the MEMS and/or NEMS devices. The
obtained experimental results show that the parameters of the fabricated structures differ basing on the theoretical ones,
which were calculated from the elasticity theory. This results from the stress in the silicon nitride film, which forms the
elastic beam structure and from the stress in the metallization deposited on the bridge. The influence of the described
factors on the bridge structure properties is also described. Bridge structures with thickness of 120 nm, width and length
ranging from 3 to 10 μm and from 20 μm to 80 μm respectively were investigated.