Dr. Maharaj Mukherjee
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 12 May 2005
Proc. SPIE. 5754, Optical Microlithography XVIII
KEYWORDS: Lithography, Spatial frequencies, Manufacturing, Printing, Very large scale integration, Photomasks, Optical proximity correction, SRAF, Resolution enhancement technologies, Algorithms

Proceedings Article | 26 June 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Wafer-level optics, Calibration, Image segmentation, Manufacturing, Computer simulations, Photomasks, Optical simulations, Optical proximity correction, Semiconducting wafers, Optics manufacturing

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Lithography, Spatial frequencies, Image processing, Manufacturing, Linear filtering, Photomasks, Optical proximity correction, Ear, Semiconducting wafers, Model-based design

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