Dr. Maharaj Mukherjee Profile

Dr. Maharaj Mukherjee

at GLOBALFOUNDRIES Inc

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Author

Publications (3)

Proceedings Article | 12 May 2005 Paper

The problem of optimal placement of sub-resolution assist features (SRAF)

Maharaj Mukherjee, Scott Mansfield, Lars Liebmann, Alexey Lvov, Evanthia Papadapoulou, Mark Lavin, Zengqin Zhao

Proc. SPIE. 5754, Optical Microlithography XVIII

KEYWORDS: Lithography, Spatial frequencies, Manufacturing, Printing, Very large scale integration, Photomasks, Optical proximity correction, SRAF, Resolution enhancement technologies, Algorithms

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Proceedings Article | 26 June 2003 Paper

Optical rule checking for proximity-corrected mask shapes

Maharaj Mukherjee, Zachary Baum, John Nickel, Timothy Dunham

Proc. SPIE. 5040, Optical Microlithography XVI

KEYWORDS: Wafer-level optics, Calibration, Image segmentation, Manufacturing, Computer simulations, Photomasks, Optical simulations, Optical proximity correction, Semiconducting wafers, Optics manufacturing

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Proceedings Article | 30 July 2002 Paper

Improved line-end foreshortening and corner-rounding control in optical proximity correction using radius of curvature method

Maharaj Mukherjee, Vinhthuy Phan

Proc. SPIE. 4691, Optical Microlithography XV

KEYWORDS: Lithography, Spatial frequencies, Image processing, Manufacturing, Linear filtering, Photomasks, Optical proximity correction, Ear, Semiconducting wafers, Model-based design

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