Maik Lano
at Friedrich-Alexander-Univ Erlangen-Nürnberg
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 25 April 2008
Proc. SPIE. 6994, Photon Management III
KEYWORDS: Optical components, Diffraction, Light sources, Roentgenium, Sensors, Free space, Wave propagation, Light wave propagation, Diffraction gratings, Shearing interferometers

Proceedings Article | 1 September 2004
Proc. SPIE. 5456, Photon Management
KEYWORDS: Lithography, Diffraction, Light sources, Light emitting diodes, Homogenization, Microlens array, Sensors, Microlens, Spatial coherence, Beam shaping

Proceedings Article | 30 July 2002
Proc. SPIE. 4691, Optical Microlithography XV
KEYWORDS: Superposition, Diffraction, Light sources, Interferometers, Wavefronts, Photomasks, Phase measurement, Phase shifts, Diffraction gratings, Shearing interferometers

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