Dr. Mainul Hossain
Principal Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Metrology, Sensors, Calibration, X-rays, Germanium, Silicon, Optical metrology, Semiconducting wafers, X-ray fluorescence spectroscopy

Proceedings Article | 24 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Wafer-level optics, Thin films, Ellipsometry, X-ray optics, Metrology, Diffractive optical elements, Optical properties, X-rays, Dielectrics, Optical testing, Process control, Deposition processes, Semiconducting wafers

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