CONFERENCE PROCEEDINGS
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Majid Taghavi
at Shahid Beheshti Univ
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Publications (3)
Proceedings Article | 17 October 2012 Paper
Design and fabrication of SU-8 MEMS electrostatically tunable optical Fabry-Perot cavity based on photolithography technique
L. Mehrvar, S. Nouri, M. Taghavi, F. Beygi Azar, M. Sadegh Cheri, M. Zibaii, M. Ghezelaiagh, H. Latifi
Proceedings Volume 8421, 84212M (2012) https://doi.org/10.1117/12.966338
KEYWORDS: Microelectromechanical systems, Sensors, Fabry–Perot interferometers, Mirrors, Photoresist materials, Fabrication, Optical lithography, Electrodes, Copper, Interferometers
Proceedings Article | 9 May 2012 Paper
Design, fabrication, characterization of a polymeric nano-precision micro z-stage
M. Ghaderi, F. Beygi Azar Aghbolagh, M. Taghavi, I. Sabri, M. Sadegh, H. Latifi
Proceedings Volume 8428, 84281I (2012) https://doi.org/10.1117/12.922049
KEYWORDS: Polymers, Copper, Electrodes, Photomasks, Nanolithography, Optical lithography, Lithography, Photoresist materials, Fabrication, Mirrors
Proceedings Article | 5 May 2012 Paper
Interferometric-displacement readout of cantilever sensors
M. Ghaderi, I. Sabri, M. Taghavi, F. Beygi Azar Aghbolagh, H. Latifi
Proceedings Volume 8430, 84301J (2012) https://doi.org/10.1117/12.922050
KEYWORDS: Charge-coupled devices, Sensors, Interferometry, Reflection, Reflectivity, Fabrication, Chemical analysis, Biosensing, Actuators, Laser applications
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