Prof. Makoto Hanabata
Retired at
SPIE Involvement:
Author
Publications (25)

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Ultraviolet radiation, Manufacturing, Transmittance, Nanoimprint lithography

PROCEEDINGS ARTICLE | March 19, 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Lithography, Optical lithography, Quartz, Ultraviolet radiation, Silicon, Oxygen, Scanning electron microscopy, Nanofibers, Nanoimprint lithography, Industrial chemicals

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Nanoimprint lithography

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Metals, Crystals, Composites, Silicon, Crystallography

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Solar cells, Crystals, Composites, Silicon, Electronic components, Antennas, Nanofibers, Crystallography, Temperature metrology

PROCEEDINGS ARTICLE | August 31, 2017
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Lithography, Nanostructures, Contamination, Ultraviolet radiation, Nanoimprint lithography, Photoresist processing, Nanoelectronics, Natural surfaces

Showing 5 of 25 publications
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