Prof. Makoto Hanabata
Retired at Osaka City Municipal Univ.
SPIE Involvement:
Author
Publications (28)

Proceedings Article | 26 March 2019
Proc. SPIE. 10958, Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019
KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Quartz, Liquids, Applied physics, Coating, Industrial chemicals, Glasses, Silicon, Semiconducting wafers

Proceedings Article | 9 October 2018
Proc. SPIE. 10787, Environmental Effects on Light Propagation and Adaptive Systems
KEYWORDS: Metals, Microelectromechanical systems, 3D printing, X-rays, Computed tomography, Nanoimprint lithography, Printing, Laser cutting, X-ray imaging, Digital cameras

Proceedings Article | 9 October 2018
Proc. SPIE. 10787, Environmental Effects on Light Propagation and Adaptive Systems
KEYWORDS: Metals, Microelectromechanical systems, Confocal microscopy, Microscopes, Glasses, Electronic components, Ultraviolet radiation, Nanoimprint lithography, 3D printing, Lithography

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Silicon, Optical lithography, Oxygen, Quartz, Nanofibers, Scanning electron microscopy, Lithography, Industrial chemicals

Proceedings Article | 19 March 2018
Proc. SPIE. 10584, Novel Patterning Technologies 2018
KEYWORDS: Ultraviolet radiation, Nanoimprint lithography, Transmittance, Manufacturing

Showing 5 of 28 publications
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