Makoto Kamata
at Keio Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2016
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Amorphous silicon, Microelectromechanical systems, Proteins, Point-of-care devices, Sensors, Sputter deposition, Electrodes, Diffusion, Laser development, Dielectrophoresis, Optical tweezers, Plasma enhanced chemical vapor deposition, Optical manipulation, Light

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