Makoto Sakakibara
at Hitachi Ltd
SPIE Involvement:
Author
Publications (5)

SPIE Journal Paper | 6 April 2019
JM3 Vol. 18 Issue 02
KEYWORDS: Critical dimension metrology, Monte Carlo methods, Electron microscopes, Scanning electron microscopy, Cadmium, Edge detection, Silicon, Optical simulations, Metrology, Inspection

Proceedings Article | 26 March 2019
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Metrology, Electrons, Scanning electron microscopy, Monte Carlo methods, Extreme ultraviolet, Extreme ultraviolet lithography, Spatial resolution, Critical dimension metrology, Line edge roughness

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Semiconductors, Cadmium, Silicon, Laser scattering, Scanning electron microscopy, Monte Carlo methods, 3D metrology, Optical simulations, Spatial resolution, Critical dimension metrology

SPIE Journal Paper | 29 June 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Virtual colonoscopy, Scanning electron microscopy, Semiconducting wafers, Metrology, Image filtering

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Semiconductors, Metrology, Logic, Electrons, Silicon, Scanning electron microscopy, 3D metrology, Process control, Image filtering, Logic devices, Critical dimension metrology, Selenium, Semiconducting wafers

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