Dr. Makoto Satake
Senior Research Engineer at Hitachi High Technologies America Inc
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | November 8, 2013
JM3 Vol. 12 Issue 04
KEYWORDS: Etching, Plasma, Oxygen, Argon, Polymethylmethacrylate, Plasma etching, Ions, Picosecond phenomena, Polymers, Directed self assembly

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8685, Advanced Etch Technology for Nanopatterning II
KEYWORDS: Polymethylmethacrylate, Etching, Argon, Ultraviolet radiation, Ions, Oxygen, Directed self assembly, Plasma etching, Picosecond phenomena, Plasma

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