Dr. Makoto Suzuki
Senior Engineer at Hitachi High-Tech Corp
SPIE Involvement:
Area of Expertise:
Scanning Electron Microscopy , Transmission Electron Microscopy , Electron beam optics , Electron-solid interaction , Electron detectors
Publications (16)

Proceedings Article | 26 May 2022 Poster + Paper
Proceedings Volume 12053, 120531Y (2022) https://doi.org/10.1117/12.2613955
KEYWORDS: Scanning electron microscopy, Neural networks, Monte Carlo methods, Sensors, Evolutionary algorithms, Computer simulations, Image processing, Algorithm development, Visibility, Convolutional neural networks

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Jong-Hyun Seo, Changhwan Lee, Byoungho Lee, Ayumi Doi, Aoi Yamauchi, Daisuke Bizen, Makoto Suzuki
Proceedings Volume 11611, 116112Q (2021) https://doi.org/10.1117/12.2583623

Proceedings Article | 30 March 2020 Presentation + Paper
Proceedings Volume 11325, 113251Q (2020) https://doi.org/10.1117/12.2551868
KEYWORDS: Metrology, Extreme ultraviolet, Scanning electron microscopy, Artificial intelligence, Image processing, Semiconducting wafers, Stochastic processes, Critical dimension metrology, Error analysis, Inspection

SPIE Journal Paper | 6 April 2019
JM3, Vol. 18, Issue 02, 021204, (April 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.2.021204
KEYWORDS: Critical dimension metrology, Monte Carlo methods, Electron microscopes, Scanning electron microscopy, Cadmium, Edge detection, Silicon, Optical simulations, Metrology, Inspection

Showing 5 of 16 publications
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