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Makoto Tanaka
at Gigaphoton Inc
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Author
Publications (2)
Proceedings Article | 27 March 2019 Paper
Extremely long life excimer laser chamber technology for multi-patterning lithography
Hiroaki Tsushima, Yousuke Fujimaki, Yasuaki Kiyota, Makoto Tanaka, Takashi Itou, Takeshi Asayama, Akihiko Kurosu, Satoshi Tanaka, Takeshi Ohta, Satoru Bushida, Takashi Saitou, Hakaru Mizoguchi
Proceedings Volume 10961, 109610X (2019) https://doi.org/10.1117/12.2515667
KEYWORDS: Electrodes, Excimer lasers, Lithography, Laser applications, Light sources, Semiconductors, Optical lithography, Semiconductor manufacturing, Semiconductor lasers, Laser development
Proceedings Article | 20 March 2018 Paper
Extremely long life excimer laser technology for multi-patterning lithography
Yousuke Fujimaki, Makoto Tanaka, Takashi Itou, Hirotaka Miyamoto, Miwa Igarashi, Hiroaki Tsushima, Takeshi Asayama, Takahito Kumazaki, Akihiko Kurosu, Takeshi Ohta, Satoru Bushida, Hakaru Mizoguchi
Proceedings Volume 10587, 105871J (2018) https://doi.org/10.1117/12.2297341
KEYWORDS: Electrodes, Excimer lasers, Lithography, Laser applications, Diffraction gratings
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