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Maksim Markushin
at Samara Univ
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Author
Publications (2)
Proceedings Article | 24 June 2019 Paper
Influence of electric field distribution on the charged particles kinetics of the off-electrode plasma formed by high-voltage gas discharge
M. Markushin, V. Kolpakov, S. Кrichevskiy
Proceedings Volume 11146, 1114613 (2019) https://doi.org/10.1117/12.2526619
KEYWORDS: Electrons, Ions, Particles, Electrodes, Molecules, Ionization, Plasma, Nitrogen
Proceedings Article | 6 April 2017 Paper
Software for analysis of the process of formation of the catalytic mask in the off-electrode plasma
M. Markushin, V. Kolpakov, S. Krichevskiy
Proceedings Volume 10342, 1034215 (2017) https://doi.org/10.1117/12.2270743
KEYWORDS: Plasma, Diffractive optical elements, Diffusion, Semiconductors, Chemical species, Photomasks, Software development, Doping, Silicon, Metals
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