Prof. Malek D. Tabbal
Associate Professor at American Univ of Beirut
SPIE Involvement:
Publications (4)

Proceedings Article | 24 February 2009 Paper
Proc. SPIE. 7201, Laser Applications in Microelectronic and Optoelectronic Manufacturing VII
KEYWORDS: Oxides, Thin films, FT-IR spectroscopy, Crystals, Silicon, Atomic force microscopy, Oxygen, Laser ablation, Manganese, Temperature metrology

Proceedings Article | 9 January 2008 Paper
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Light emitting diodes, Annealing, Luminescence, Ions, Silicon, Semiconductor lasers, Ion implantation, Semiconducting wafers, Active optics, Pulsed laser operation

Proceedings Article | 13 March 2007 Paper
Proc. SPIE. 6458, Photon Processing in Microelectronics and Photonics VI
KEYWORDS: Crystals, Silicon, Sulfur, Magnetism, Chromium, Semiconductor lasers, Excimer lasers, Laser crystals, Plasma, Absorption

Proceedings Article | 1 February 1994 Paper
Proc. SPIE. 2045, Laser-Assisted Fabrication of Thin Films and Microstructures
KEYWORDS: Optical lithography, Quartz, Argon, Copper, Gallium arsenide, Silicon, Microelectronics, Excimer lasers, Excimers, Tin

Conference Committee Involvement (1)
Laser Applications in Microelectronic and Optoelectronic Manufacturing XIII
21 January 2008 | San Jose, California, United States
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