Dr. Malgorzata Kalisz Profile

Dr. Malgorzata Kalisz

at Warsaw Univ of Technology

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Publications (2)

Proceedings Article | 8 March 2019 Presentation

Atomic layer deposited metallic oxides for optical fiber sensors (Conference Presentation)

Kamil Kosiel, Karolina Pagowska, Maciej Kozubal, Marek Guziewicz, Krystyna Golaszewska-Malec, Krystyna Lawniczak-Jablonska, Rafal Jakiela, Pawel Rejmak, Joanna Libera, Malgorzata Kalisz, Marcin Koba, Michal Szymański, Magdalena Dominik, Joanna Niedziólka-Jönsson, Wojtek Bock, Mateusz Smietana

Proceedings Volume 10926, 109261B (2019) https://doi.org/10.1117/12.2510580

KEYWORDS: Oxides, Fiber optics sensors, Sensors, Atomic layer deposition, Optical coatings, Chemical analysis, Spectroscopy, Optical sensors, Thin films, Thin film coatings

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Proceedings Article | 25 July 2013 Paper

Ultra-shallow fluorine and nitrogen implantation from r.f. plasma and its effect on electro-physical parameters of Al/HfO2/Si MOS structures

M. Kalisz, R. Mroczyński, M. Szymańska

Proceedings Volume 8902, 89020E (2013) https://doi.org/10.1117/12.2030304

KEYWORDS: Fluorine, Nitrogen, Ions, Plasma, Silicon, Molybdenum, Silica, Dielectrics, Reactive ion etching, Plasma enhanced chemical vapor deposition

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