Dr. Malgorzata Kalisz
at Warsaw Univ of Technology
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 25, 2013
Proc. SPIE. 8902, Electron Technology Conference 2013
KEYWORDS: Silica, Dielectrics, Ions, Silicon, Nitrogen, Plasma enhanced chemical vapor deposition, Reactive ion etching, Molybdenum, Fluorine, Plasma

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