Mamoru Tamura
at Nissan Chemical Industries Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 12 October 2018
Proc. SPIE. 10809, International Conference on Extreme Ultraviolet Lithography 2018
KEYWORDS: Carbon, Lithography, Etching, Metals, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, System on a chip

Proceedings Article | 19 March 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Lithography, Optical lithography, Etching, Dry etching, Polymers, Materials processing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist processing

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Etching, Polymers, Resistance, Process control, Photomasks, Absorbance, Wet etching, Semiconductor manufacturing, Semiconducting wafers, Adhesives, Tin

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