Ms. Mana Tanabe Profile

Mana Tanabe

at Toshiba Memory Corp.

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Author

Publications (3)

Proceedings Article | 29 September 2019 Presentation + Paper

Novel cleaning technology for nanoparticle removal

Mana Tanabe, Kosuke Takai, Kyo Otsubo, Kaori Umezawa, Minako Iinuma, Hideaki Sakurai, Shingo Kanamitsu

Proceedings Volume 11148, 111480N (2019) https://doi.org/10.1117/12.2536471

KEYWORDS: Particles, Photomasks, Nanoparticles, Liquids, Nanotechnology, Inspection, Lithography, Optical lithography

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Proceedings Article | 5 October 2016 Paper

High-performance fabrication process for 2xnm hole-NIL template production

Keisuke Yagawa, Machiko Suenaga, Takeharu Motokawa, Mana Tanabe, Akihiko Ando, Eiji Yamanaka, Keiko Morishita, Shingo Kanamitsu, Masato Saito, Masamitsu Itoh

Proceedings Volume 9985, 99852E (2016) https://doi.org/10.1117/12.2243575

KEYWORDS: Lithography, Nanoimprint lithography, Image quality, Etching, Photoresist processing, Optical lithography, Defect inspection, X-rays, Double patterning technology, Semiconducting wafers

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Proceedings Article | 10 May 2016 Paper

High resolution hole patterning with EB lithography for NIL template production

Mana Tanabe, Keisuke Yagawa, Takeharu Motokawa, Kazuki Hagihara, Machiko Suenaga, Masato Saito, Shingo Kanamitsu, Masamitsu Itoh

Proceedings Volume 9984, 99840T (2016) https://doi.org/10.1117/12.2242363

KEYWORDS: Nanoimprint lithography, Optical lithography, Lithography, Dry etching, Image processing, Photoresist processing, Etching, Scanning electron microscopy, Semiconducting wafers, Vestigial sideband modulation

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