Mr. Manfred Dirscherl
at Bayerisches Laserzentrum gGmbH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 18, 2003
Proc. SPIE. 5063, Fourth International Symposium on Laser Precision Microfabrication
KEYWORDS: Actuators, Silicon, Coating, Laser processing, Manufacturing, Laser ablation, Micromachining, Tolerancing, Pulsed laser operation, Laser systems engineering

PROCEEDINGS ARTICLE | October 17, 2003
Proc. SPIE. 4977, Photon Processing in Microelectronics and Photonics II
KEYWORDS: Actuators, Silicon, Laser processing, Nd:YAG lasers, Laser welding, Semiconductor lasers, Laser ablation, Laser cutting, Pulsed laser operation, Absorption

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