Prof. Manseung Seo
Professor at Tongmyong Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | April 12, 2013
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Lithography, Diffraction, Mirrors, Optical lithography, Gaussian beams, Aspheric lenses, Photomasks, Beam shaping, Digital micromirror devices, Imaging arrays

PROCEEDINGS ARTICLE | November 26, 2012
Proc. SPIE. 8557, Optical Design and Testing V
KEYWORDS: Lithography, Diffraction, Gaussian beams, Micromirrors, Photomasks, Maskless lithography, Digital micromirror devices, Line edge roughness, Imaging arrays, Binary data

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