Marc-Peter Schmidt
at Otto von Guericke Univ Magdeburg
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 21, 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Sensors, Etching, Quartz, Metals, Glasses, Crystals, Nickel, Photomasks, Acoustics, Semiconducting wafers

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