Marc-Peter Schmidt
at Otto von Guericke Univ Magdeburg
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 May 2015
Proc. SPIE. 9517, Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems
KEYWORDS: Etching, Crystals, Photomasks, Sensors, Quartz, Semiconducting wafers, Nickel, Glasses, Metals, Acoustics

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