Marc Bouchardy
Masks Process Engineer at X-FAB France SAS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2006
Proc. SPIE. 6155, Data Analysis and Modeling for Process Control III
KEYWORDS: Lithography, Sensors, Robotics, Process control, Critical dimension metrology, Chemical elements, Data communications, Semiconducting wafers, Wafer testing, Temperature metrology

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