Prof. Marc J. Madou
Vice President/Advanced Technology at Univ of California Irvine
SPIE Involvement:
Conference Program Committee | Symposium Committee | Author | Instructor
Publications (28)

PROCEEDINGS ARTICLE | September 17, 2018
Proc. SPIE. 10728, Biosensing and Nanomedicine XI
KEYWORDS: Carbon, Environmental monitoring, Proteins, Tissues, Nitrogen, Neural networks, Nanomaterials, Nanofibers, Stem cells, 3D microstructuring

PROCEEDINGS ARTICLE | September 17, 2018
Proc. SPIE. 10728, Biosensing and Nanomedicine XI
KEYWORDS: Carbon, Nanostructures, Biosensing, Modulation, Ions, Nitrogen, Diagnostics, Iodine, Adsorption, Nanofibers

PROCEEDINGS ARTICLE | September 28, 2016
Proc. SPIE. 9932, Carbon Nanotubes, Graphene, and Emerging 2D Materials for Electronic and Photonic Devices IX
KEYWORDS: Carbon, Nanoparticles, Electrodes, Polymers, Metals, Manufacturing, Biosensors, Nanofibers, Nanolithography, Biofuels

PROCEEDINGS ARTICLE | September 26, 2016
Proc. SPIE. 9932, Carbon Nanotubes, Graphene, and Emerging 2D Materials for Electronic and Photonic Devices IX
KEYWORDS: Optical fibers, Organic photovoltaics, Graphene, Sensors, Polymers, Electron microscopes, Scanning electron microscopy, Nanofibers, Microfabrication, Photomicroscopy

PROCEEDINGS ARTICLE | April 9, 2010
Proc. SPIE. 7642, Electroactive Polymer Actuators and Devices (EAPAD) 2010
KEYWORDS: Actuators, Gold, Glucose, Electrodes, Ions, Biosensors, Photoresist materials, Microactuators, Semiconducting wafers, Electroactive polymers

PROCEEDINGS ARTICLE | April 1, 2010
Proc. SPIE. 7647, Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2010
KEYWORDS: Carbon, Sensors, Electrodes, Polymers, Manufacturing, Resistance, Biosensors, Photoresist materials, Fractal analysis, Electroactive polymers

Showing 5 of 28 publications
Conference Committee Involvement (11)
Micro-Optics
4 April 2016 | Brussels, Belgium
Micro-Optics
14 April 2014 | Brussels, Belgium
SPIE MOEMS-MEMS
2 February 2013 | San Francisco, United States
Micro-Optics
16 April 2012 | Brussels, Belgium
SPIE MOEMS-MEMS
21 January 2012 | San Francisco, United States
Showing 5 of 11 published special sections
Course Instructor
SC437: Microfabrication Techniques for MicroFluidics & BioMEMS
In this course we explore the science of miniaturization providing an in-depth understanding of applications, knowledge of different manufacturing options, familiarity with all materials choices, and an understanding of scaling laws. Miniaturization techniques surveyed are both top-down methods, in which one builds down from the large to the small, and bottom-up methods, in which one builds up from the small to the large. Top-down miniaturization methods and materials surveyed include micro-machining with single crystal and polycrystalline Si and other micromachining methods and materials based on lithography as well as nonlithographic miniaturization. In dealing with micromachining techniques borrowed from the electronics industry, we emphasize those that differ most from standard processes and materials used in regular integrated circuit (IC) and hybrid manufacturing. Although miniaturization and IC fabrication methods are intertwined, in miniaturization science a much wider variety of processes, more and different materials, and other applications are considered.
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