Marc Smits
Design Leader at Mapper Lithography
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Carbon, Lithography, Contamination, Chemical species, Polymers, Silicon, Scanning electron microscopy, Projection systems, Thin film coatings, Semiconducting wafers

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