Dr. Marc Weimer
Senior Research Associate at Brewer Science Inc
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | April 2, 2010
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Defect detection, Quartz, Polymers, Particles, Crystals, Scanning electron microscopy, Organic materials, Semiconducting wafers, Wafer testing, Systems modeling

PROCEEDINGS ARTICLE | April 2, 2007
Proc. SPIE. 6519, Advances in Resist Materials and Processing Technology XXIV
KEYWORDS: Lithography, Multilayers, Etching, Silicon, Reflectivity, Photomasks, Plasma etching, Semiconducting wafers, System on a chip, Plasma

PROCEEDINGS ARTICLE | May 4, 2005
Proc. SPIE. 5753, Advances in Resist Technology and Processing XXII
KEYWORDS: Lithography, Lithographic illumination, Polarization, Reflectivity, Electroluminescence, Scanning electron microscopy, Line width roughness, Immersion lithography, Line edge roughness, Semiconducting wafers

PROCEEDINGS ARTICLE | June 12, 2003
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Lithography, Polymers, Molecules, Silicon, Reflectivity, Chromophores, Silicon films, Critical dimension metrology, Semiconducting wafers, Bottom antireflective coatings

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