Marcel Flemming
at Fraunhofer IOF
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 17 June 2009
Proc. SPIE. 7389, Optical Measurement Systems for Industrial Inspection VI
KEYWORDS: Optical components, Silica, Etching, Chromium, Atomic force microscopy, Scanning electron microscopy, Photomasks, Associative arrays, Critical dimension metrology, Binary data

Proceedings Article | 20 October 2005
Proc. SPIE. 5965, Optical Fabrication, Testing, and Metrology II
KEYWORDS: Thin films, Nanostructures, Multilayers, Metrology, Spatial frequencies, Silicon, Interference (communication), Atomic force microscopy, Thin film coatings, Semiconducting wafers

Proceedings Article | 25 February 2004
Proc. SPIE. 5250, Advances in Optical Thin Films
KEYWORDS: Thin films, Nanostructures, Scattering, Water, Light scattering, Coating, Atomic force microscopy, Solids, Optical interferometry, Scanning tunneling microscopy

Proceedings Article | 4 November 2003
Proc. SPIE. 5188, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies
KEYWORDS: Nanotechnology, Reflection, Scattering, Water, Glasses, Light scattering, Coating, Optical coatings, Optical inspection, Scatter measurement

Proceedings Article | 2 November 2000
Proc. SPIE. 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries
KEYWORDS: Optical components, Lithography, Optical spheres, Scattering, Sensors, Light scattering, Nitrogen, Lamps, Optical testing, Scatter measurement

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