Dr. Marcel Tichem
Associate Professor at Technische Univ Delft
Publications (6)

PROCEEDINGS ARTICLE | May 13, 2016
Proc. SPIE. 9891, Silicon Photonics and Photonic Integrated Circuits V
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Silica, Waveguides, Etching, Silicon, Resistance, Integration, Plasma etching, Photonic integrated circuits, Optical alignment, Optical alignment, Optical interconnects, Assembly tolerances

PROCEEDINGS ARTICLE | May 13, 2016
Proc. SPIE. 9891, Silicon Photonics and Photonic Integrated Circuits V
KEYWORDS: Thin films, Silica, Silicon, Optical fabrication, Semiconducting wafers, Assembly equipment

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9753, Optical Interconnects XVI
KEYWORDS: Microelectromechanical systems, Actuators, Gold, Modeling, Silica, Waveguides, Silicon, Chromium, Finite element methods, Photonic integrated circuits, Optical alignment, Silicon photonics, Motion models

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9760, MOEMS and Miniaturized Systems XV
KEYWORDS: Actuators, Silica, Waveguides, Cladding, Silicon, Photoresist materials, Photonics, Microopto electromechanical systems, Integration, Plasma etching, Photonic integrated circuits, Optical alignment, Structural design, Semiconducting wafers, Optical arrays

PROCEEDINGS ARTICLE | May 1, 2014
Proc. SPIE. 9133, Silicon Photonics and Photonic Integrated Circuits IV
KEYWORDS: Microelectromechanical systems, Actuators, Silica, Waveguides, Cladding, Etching, Silicon, Microactuators, Photonic integrated circuits, Optical alignment

PROCEEDINGS ARTICLE | September 8, 2011
Proc. SPIE. 8007, Photonics North 2011
KEYWORDS: MATLAB, Silica, Waveguides, Etching, Silicon, Photonics systems, Convolution, Optical alignment, Tolerancing, Assembly tolerances

Showing 5 of 6 publications
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