Mr. Marco Del Sarto
at ST Microelectronics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Microelectromechanical systems, Actuators, Mirrors, Etching, Electrodes, Metals, Silicon, Optical switching, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | January 15, 2003
Proc. SPIE. 4979, Micromachining and Microfabrication Process Technology VIII
KEYWORDS: Microelectromechanical systems, Actuators, Electrodes, Metals, Silicon, Magnetism, Microactuators, Head, Finite element methods, Semiconducting wafers

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