Dr. Marco Feldmann
at Technische Univ Braunschweig
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | May 17, 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Actuators, Lithography, Microfluidics, Phase modulation, Polymers, Ultraviolet radiation, Particles, Magnetism, Microactuators, Electromagnetism

PROCEEDINGS ARTICLE | December 27, 2007
Proc. SPIE. 6799, BioMEMS and Nanotechnology III
KEYWORDS: Actuators, Lithography, Microfluidics, Polymers, Glasses, Particles, Magnetism, Laser induced plasma spectroscopy, Electromagnetism, Plasma

PROCEEDINGS ARTICLE | December 21, 2007
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Actuators, Lithography, Polymers, Copper, Composites, Photography, Magnetism, Robots, Electroplating, Electromagnetism

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