Dr. Marco Feldmann
at Technische Univ Braunschweig
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 17 May 2013 Paper
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Magnetism, Microactuators, Electromagnetism, Polymers, Microfluidics, Actuators, Ultraviolet radiation, Lithography, Phase modulation, Particles

Proceedings Article | 27 December 2007 Paper
Proc. SPIE. 6799, BioMEMS and Nanotechnology III
KEYWORDS: Microfluidics, Actuators, Polymers, Magnetism, Laser induced plasma spectroscopy, Glasses, Plasma, Lithography, Electromagnetism, Particles

Proceedings Article | 21 December 2007 Paper
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Actuators, Robots, Lithography, Electroplating, Polymers, Magnetism, Electromagnetism, Photography, Composites, Copper

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