Dr. Marco Moraja
Business Area Manager at SAES Getters SpA
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 31 May 2012
Proc. SPIE. 8353, Infrared Technology and Applications XXXVIII
KEYWORDS: Microelectromechanical systems, Microbolometers, Thin films, Methane, Sensors, Metals, Gases, Carbon monoxide, Thin film devices, Instrument modeling

SPIE Journal Paper | 1 July 2008
JM3 Vol. 7 Issue 03
KEYWORDS: Cesium, Absorption, Silicon, Glasses, Atomic clocks, Semiconducting wafers, Etching, Modulation, Microelectromechanical systems, Chemical species

Proceedings Article | 14 February 2008
Proc. SPIE. 6884, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VII
KEYWORDS: Microelectromechanical systems, Argon, Molecules, Silicon, Gases, Reliability, Semiconducting wafers, Carbon monoxide, Testing and analysis, Wafer bonding

Proceedings Article | 6 January 2006
Proc. SPIE. 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
KEYWORDS: Microelectromechanical systems, Packaging, Infrared sensors, Thin films, Sensors, Silicon, Gases, Sensor performance, Semiconducting wafers, Carbon monoxide

Proceedings Article | 23 December 2003
Proc. SPIE. 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III
KEYWORDS: Microelectromechanical systems, Packaging, Glasses, Particles, Silicon, Silicon films, Semiconducting wafers, Carbon monoxide, Wafer bonding, Industrial chemicals

Showing 5 of 6 publications
Conference Committee Involvement (1)
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS VI
23 January 2007 | San Jose, California, United States
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