Mareike Stephan
at Fraunhofer IZFP
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 9, 2005
Proc. SPIE. 5766, Testing, Reliability, and Application of Micro- and Nano-Material Systems III
KEYWORDS: Sensors, Silicon, Materials processing, Signal processing, Acoustic emission, Abrasives, Acoustics, Semiconducting wafers, Signal detection, Surface finishing

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